PI Post Bake/PA Oven/BPC Oven/ARC Oven
- Substrate size：G3.5~G10.5
- Temperature range：120℃~450℃
- Excellent temperature uniformity：≦±3℃
- O2 control：3%~30%, ±1%
- Cleanliness level：Class 10
- Transportation：Robot
- Recipe edit
- Application
LTPS：SD/metal annealing
Cell：BPC oven、PIPB、ARC oven
Photo Alignment：PIPB、PA Oven
- Adopt Japan slim type IR plate
- Gas (N2、O2、humidity) control capable
- Non-contact and sealing shutter design available
- Cleanliness level：Class 10
- Apply APC to collect EQ data. Real time error diagnose and classify
- Customer base: AUO, InnoLux, HKC, CHOT, TIANMA
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