Hybrid Pre-anneal
- The Best Solution for Permanent Bonding to Improve Yield.
- Flexible process capability: WoW mode / Pre-anneal mode.
- Superior pressure & temperature uniformity.
Max. pressure: 0.5MPa - Max. temperature: 180℃
- Real time process status monitor.
- SECS/GEM compatible.
Downloads
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| 型錄下載 |
