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12-inch Hot-in Hot-out Type Auto Oven
- Oven Max. Working Temp: 250°C (customization possible)
- Tempurature Uniformity: ±3°C
- Cleanliness class within EFEM: Class 100
- Cleanliness class within Chamber: Class 100
- Power: AC 220V /3Φ/ 60Hz
- High throughput with WPH 4-times higher than batch-type oven.
- Working temperature keeps at constant temperature can shorten wafer/wafer frame ramp up time.
- Energy saving with utility demand at least 50% less than batch-type oven.
- Small footprint Capacity of each chamber is 104pcs of wafer. Contribute to increase throughput substantially.