AUTO INNER LAYER COLLIMATED UV EXPOSURE SYSTEM

Wendy Tseng

Applicable range：
Panel size：254*304.8mm(10″*12″)~558.8*635mm(22-25″)
Panel thickness：0.05-2mm
Film size：24″*27″
Machine dimensions(W/D/H)：2840/2900/2237.5(mm)

High production speed: Mechanical action time 8 seconds
High alignment accuracy: Alignment accuracy 3ơ< 10 µm
High resolution: Ensure resolution L/S = 2mil / 2mil
Whole machine clean grade: Class 1000
Load conveyor roller driven by non-contact magnetic rings design without particle concerns
High rigidity base to strengthen machine stability
Pass line height 950~1030mm, meet the clean room requirement
Extension type CCD vision and backlight module to increase the maximum panel utilization
Using new type alignment algorithm to ensure sharing film error
Exposure chamber environmental control system effectively increases A / W stability
Linear motor transfer system to improve the cleanliness, accuracy, speed

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