PLP Microwave Plasma Photoresist Removal Equipment
SKU：PRSM-BM2R6025A
- Applicable to panels up to 600 x 600 mm
- Solution for large-area warpage.
- System supports two or more process chambers.
- Stable automated transfer system.
- Fully digital conrol and SECS/GEM compliant.
- Choice of 3 process mode：Microwave, RIE or Microwave+bias (dual source)
- The low-damage, high-density microwave plasma system features high-efficiency plasma processing.
- The large-area microwave source and medium frequency bias solutions enhance large-area uniformity.
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