1.Dominant wavelength DUV：185nm and 254nm EUV：172nm 2.Transportation：Robot or conveyor 3.Effect of cleaning：Contact angle≦5∘ 4.Uniformity of irradiation：≧90% 5.Cleanliness leve：Class 10

1.Substrate width：220mm~600mm 2.Substrate thickness：50µm~200µm (without PF) 3.Conveyor speed：0.5 ~ 5M/min. 4.Rewinding accuracy：≦±0.5 mm 5.Cutting accuracy：≦±0.5 mm 6.Laminating accuracy：≦±1mm 7.No material alarm

1.VOC treatment capacity：40~120M³/min. 2.Size W/L/H(mm)：3250/2350/2100

Delivery speed: 1~5M/min (adjustable) Vacuum range: 0.2~20Torr Pressure pressure: 0~5kg/cm2 Heater: 3.4KW*2

Panel Dimension： Length：200m Width：250/500mm Thickness：0.035-0.4mm Dimension(W/D/H)：2560/1410/22259(mm)

Panel Dimension： Length：250-640mm(10″ to 25″) Width：250-640mm(10″ to 25″) Thickness：0.05mm Dimension(W/D/H)：1575/2160/2100(mm)，1600kg

Refer to the catalog

Refer to the catalog